NANF212 Basic Nanofabicration Processes
The course will provide an overview of basic processing steps in nanofabrication. A step-by-step description of the equipment and processes needed to fabricate devices and structures will be examined for microelectromechanical (MEM) devices, biomedical 'lab-on-chip' structures, display devices, and microelectronic devices including the diode, transistor, and full CMOS structures. Students will undertake 'hands-on' processing. Offered at the Nanofabrication facility of Pennsylvania State University, main campus.
Prerequisite
Permission of the department
Lecture/Lab Ratio
2:2