NANF214 Lithography for Nanofabrication

Lithography is a key part of the nanofabrication equipment, processing, and materials base. This course will cover all aspects of lithography from design and mask fabrication to pattern transfer and inspection. Emphasis will be on using state-of-the-art lithography equipment in the Nanofabrication Facility cleanrooms. Prereq. - permission of department. Offered at the Nanofabrication facility of Pennsylvania State University, main campus.


3 credits


Permission of the department

Lecture/Lab Ratio