NANF213 Thin Films in Nanofabrication

This course will cover thin film deposition and etching practices in nanofabrication. The purpose is to develop a full understanding of the use of, and the processing involved in, thin film materials in nanofabrication. The emphasis is on learning with and using state-of-the-art processing equipment in the Nanofabrication Facility cleanrooms. Prereq. - permission of department. Offered at the Nanofabrication facility of Pennsylvania State University, main campus.


3 credits


Permission of the department

Lecture/Lab Ratio