NANF212 Basic Nanofabicration Processes

The course will provide an overview of basic processing steps in nanofabrication. A step-by-step description of the equipment and processes needed to fabricate devices and structures will be examined for microelectromechanical (MEM) devices, biomedical 'lab-on-chip' structures, display devices, and microelectronic devices including the diode, transistor, and full CMOS structures. Students will undertake 'hands-on' processing. Prereq. - permission of department. Offered at the Nanofabrication facility of Pennsylvania State University, main campus.


3 credits


Permission of the department

Lecture/Lab Ratio